GlobalFoundries

GlobalFoundries Inc. (GF) is a multinational semiconductor contract manufacturing and design company incorporated in the Cayman Islands and headquartered in Malta, New York.[4] Created by the divestiture of the manufacturing arm of AMD, the company was privately owned by Mubadala Investment Company, the sovereign wealth fund of the United Arab Emirates, until an initial public offering (IPO) in October 2021.

GlobalFoundries Inc.
TypePublic
ISINKYG393871085
IndustrySemiconductors
FoundedMarch 2, 2009 (2009-03-02) (as a spin-off of AMD)
HeadquartersMalta, New York, U.S.
Key people
Ahmed Yahia Al Idrissi
(Chairman)
Thomas Caulfield
(CEO)
ServicesSemiconductor manufacturer
RevenueIncrease US$8.1 billion (2022)
Increase US$1.16 billion (2022)
Increase US$1.4 billion (2022)
Total assetsIncrease US$17.8 billion (2022)
Total equityIncrease US$9.9 billion (2022)
Number of employees
13,000 (2022)
Websitegf.com
Footnotes / references
[1][2][3]

The company manufactures integrated circuits on wafers designed for markets such as smart mobile devices, automotive, aerospace and defense, consumer internet of things (IoT) and for data centers and communications infrastructure.

As of 2023, GlobalFoundries is the third-largest semiconductor foundry by revenue.[5] [6][7] It is the only one with operations in Singapore, the European Union, and the United States: one 200 mm and one 300 mm wafer fabrication plant in Singapore; one 300 mm plant in Dresden, Germany; one 200 mm plant in Burlington, Vermont (where it is the largest private employer)[8] and one 300 mm plant in the State of New York: in Malta.[9]

GlobalFoundries is a "Trusted Foundry" for the U.S. federal government and has similar designations in Singapore and Germany, including certified international Common Criteria standard (ISO 15408, CC Version 3.1).[10][11]

On October 28, 2021, the company sold shares in an IPO on the Nasdaq stock exchange at US$47 each, at the higher end of its targeted price range, and raised about US$2.6 billion.[12]

Overview

On October 7, 2008, AMD announced it planned to go fabless and spin off their semiconductor manufacturing business into a new company temporarily called The Foundry Company. Mubadala announced their subsidiary Advanced Technology Investment Company (ATIC) agreed to pay $700 million to increase their stake in AMD's semiconductor manufacturing business to 55.6% (up from 8.1%). Mubadala will invest $314 million for 58 million new shares, increasing their stake in AMD to 19.3%. $1.2 billion of AMD's debt will be transferred to The Foundry Company.[13] On 8 December 2008, amendments were announced. AMD will own approximately 34.2% and ATIC will own approximately 65.8% of The Foundry Company.[14]

On March 4, 2009, GlobalFoundries was officially announced.[15] On September 7, 2009, ATIC announced it would acquire Chartered Semiconductor, based in Singapore, for S$2.5 billion (US$1.8 billion) and integrate Chartered Semiconductor into GlobalFoundries.[16] On January 13, 2010, GlobalFoundries announced it had finalized the integration of Chartered Semiconductor.[17]

On March 4, 2012, AMD announced they divested their final 14% stake in the company, which concluded AMD's multi-year plan to divest its manufacturing arm.[18]

On October 20, 2014, IBM announced the sale of its microelectronics business to GlobalFoundries.[19]

As of 2015, the firm owned ten fabrication plants. Fab 1 is in Dresden, Germany. Fabs 2 through 7 are in Singapore. Fabs 8 through 10 are in the northeast United States. These sites are supported by a global network of R&D, design enablement, and customer support in Singapore, China, Taiwan, Japan, India, the United States, Germany, and the United Kingdom.[20] In February 2017, the company announced a new 300 Fab [Fab 11] in China for growing semiconductor market in China.[21]

In 2016, GlobalFoundries licensed the 14 nm 14LPP FinFET process from Samsung Electronics. In 2018, GlobalFoundries developed the 12 nm 12LP node based on Samsung's 14 nm 14LPP process.[22]

On August 27, 2018, GlobalFoundries announced it had cancelled their 7LP process due to a strategy shift to focus on specialized processes instead of leading edge performance.[23]

On January 29, 2019, AMD announced an amended wafer supply agreement with GlobalFoundries. AMD now has full flexibility for wafer purchases from any foundry at 7 nm or beyond. AMD and GlobalFoundries agreed to commitments and pricing at 12 nm for 2019 through 2021.[24]

On May 20, 2019, Marvell Technology Group announced it would acquire Avera Semi from GlobalFoundries for $650 million and potentially an additional $90 million. Avera Semi was GlobalFoundries' ASIC Solutions division, which had been a part of IBM's semiconductor manufacturing business.[25] On February 1, 2019, GlobalFoundries announced the $236 million sale of its Fab 3E in Tampines, Singapore, to Vanguard International Semiconductor (VIS) as part of their plan to exit the MEMS business by December 31, 2019.[26] On April 22, 2019, GlobalFoundries announced the $430 million sale of their Fab 10 in East Fishkill, New York, to ON Semiconductor. GlobalFoundries has received $100 million and will receive $330 million at the end of 2022 when ON Semiconductor will gain full operational control. The 300mm fab is capable of 65 nm to 40 nm and was a part of IBM.[27] On August 15, 2019, GlobalFoundries announced a multi-year supply agreement with Toppan Photomasks. The agreement included Toppan acquiring GlobalFoundries' Burlington photomask facility.[28]

In February 2020, GlobalFoundries announced that its embedded magnetoresistive non-volatile memory (eMRAM) entered production which is the industry's first production ready eMRAM.[29]

In May 2020, GlobalFoundries stated it was fully abandoning its plans of opening Fab 11 in Chengdu, China due to reported rivalry between the latter and the US.[30] This was three years after the manufacturer announced it would invest $10 billion to open the new fab; the fab was never brought online.[31]

On April 26, 2021, GlobalFoundries announced that effective immediately, it was transferring its global headquarters from Santa Clara, California to its Malta, New York campus (home to Fab 8).[32]

In August 2022, Google expanded its open-source chip design and manufacturing efforts by partnering with GlobalFoundries to develop an open-source process design kit (PDK) based on the foundry's 180 nm node.[33][34] In October 31, Google announced they would sponsor no-cost OpenMPW (multi-project wafer) shuttle runs for it in the coming months.[35]

In February 2023, GlobalFoundries signed a deal to become the exclusive provider of US-produced semiconductor chips for GM amid an ongoing shift to electric vehicles in what was referred to as an "industry-first" deal. It would help GM reduce the amount of different chips needed in its vehicles. The companies planned for production in Malta, New York. The deal would not lead to new jobs right away but would rather ensure stability in the supply of chips. At the time of the announcement, GlobalFoundries CEO Thomas Caufield said the full effect of this increase in production would be seen in two to three years.[36][37][38][39][40]

On September 21, 2023, the U.S. Department of Defense (DoD) awarded GlobalFoundries a 10-year contract for the supply of securely manufactured semiconductors for critical aerospace and defense applications. With an initial award of $17.3 million and an overall 10-year spending ceiling of $3.1 billion, this agreement ensures the DoD and its contractors have access to GF's U.S.-made semiconductors. This contract also provides access to GF's design ecosystem, IP libraries, and advanced technologies.[41]

GlobalFoundries v. TSMC et al (2019)

On August 26, 2019, GlobalFoundries filed patent infringement lawsuits against TSMC and some of TSMC's customers[42] in the US and Germany. GlobalFoundries claims TSMC's 7 nm, 10 nm, 12 nm, 16 nm, and 28 nm nodes have infringed on 16 of its patents. Lawsuits were filed in the U.S. International Trade Commission, the U.S. Federal District Courts in the Districts of Delaware, the Western District of Texas, the Regional Courts of Düsseldorf, and Mannheim in Germany.[43] GlobalFoundries has named 20 defendants: Apple, Broadcom, MediaTek, Nvidia, Qualcomm, Xilinx, Arista, ASUS, BLU, Cisco, Google, Hisense, Lenovo, Motorola, TCL, OnePlus, Avnet/EBV, Digi-Key and Mouser.[44] On August 27, TSMC announced it was reviewing the complaints filed, but are confident that the allegations are baseless and will vigorously defend its proprietary technology.[45]

On October 1, 2019, TSMC filed patent infringement lawsuits against GlobalFoundries in the US, Germany and Singapore. TSMC claimed GlobalFoundries' 12 nm, 14 nm, 22 nm, 28 nm and 40 nm nodes have infringed on 25 of its patents.[46]

On October 29, 2019, TSMC and GlobalFoundries announced a resolution to the dispute. The companies agreed to a new life-of-patents cross-license for all of their existing semiconductor patents as well as new patents to be filed by the companies in the next ten years.[47][48][49][50][51]

List of GlobalFoundries CEOs

Fabrication foundries in operation

Name Wafer Location Process
Fab 1 300 mm Dresden, Germany 51.125°N 13.716°E / 51.125; 13.716 (GlobalFoundries Fab 1, Dresden) 55, 45, 40, 32, 28, 22 nm, 12 nm
Fab 2 200 mm Woodlands, Singapore 1.436°N 103.766°E / 1.436; 103.766 (GlobalFoundries Fabs in Woodlands, Singapore) 600–350 nm
Fab 3/5 200 mm Woodlands, Singapore 1.436°N 103.766°E / 1.436; 103.766 (GlobalFoundries Fabs in Woodlands, Singapore) 350–180 nm
Fab 3E 200 mm Tampines, Singapore (2019: sold to VIS) 1.371°N 103.929°E / 1.371; 103.929 (GlobalFoundries Fabs in Tampines, Singapore) 180 nm
Fab 6 200 mm Woodlands, Singapore (converted to 300 mm and merged into Fab 7) 1.436°N 103.766°E / 1.436; 103.766 (GlobalFoundries Fabs in Woodlands, Singapore) 180–110 nm
Fab 7 300 mm Woodlands, Singapore 1.436°N 103.766°E / 1.436; 103.766 (GlobalFoundries Fabs in Woodlands, Singapore) 130–40 nm
Fab 8 300 mm Luther Forest Technology Campus, Saratoga County, New York, United States 42.970°N 73.756°W / 42.970; -73.756 (GlobalFoundries Fab 8) 28, 20, 14 nm
Fab 9 200 mm Essex Junction, Vermont, United States 44.48°N 73.10°W / 44.48; -73.10 (GlobalFoundries Fab 9)[55] 350–90 nm

300 mm fabrication facilities

Globalfoundries Fab 1 in Dresden

Fab 1

Fab 1, located in Dresden, Germany, is a 364,512 m2 plant which was transferred to GlobalFoundries on its inception: Fab 36 and Fab 38 were renamed Module 1 and Module 2, respectively. Each module can produce 25,000 300 mm diameter wafers per month.[9][56]

Module 1 is a 300 mm wafer production facility. It is capable of manufacturing wafers at 40 nm, 28 nm BULK and 22 nm FDSOI. Module 2 was originally named "(AMD) Fab 30" and was a 200 mm fab producing 30,000 Wafer Outs Per Month, but has now been converted into a 300 mm wafer fab. Together with other clean room extensions like the Annex they have a maximum full capacity of 80,000 of 300 mm wafers/month (180,000 200 mm wafers/month equivalent), using technologies of 45 nm and below.

In September 2016, GlobalFoundries announced Fab 1 would be refit to produce 12 nm fully depleted silicon on insulator (FDSOI) products.[57] The company expected customer's products would begin to tape out in the first half of 2019.

Fab 7

Fab 7, located in Woodlands, Singapore, is an operational 300 mm Fab, originally owned by Chartered Semiconductor. It produces wafers at 130 nm to 40 nm on bulk CMOS and SOI processes. It has a maximum full capacity of 50,000 300 mm wafers/month (112,500 200 mm wafers/month equivalent), using 130 to 40 nm technology.[9]

4/15/2021 Fab 7's target capacity will be expanded to 70–80kpcs/M.

Fab 8

Fab 8, located in Luther Forest Technology Campus, Saratoga County, New York, United States is a 300 mm fab. This fabrication plant was constructed by GF as a green field fab for advanced technologies. It is capable of manufacturing 14 nm node technology. The plant's construction began in July 2009 and the company started mass production in 2012.[9][58] It has a maximum manufacturing capacity of 60,000 of 300 mm wafers/month, or the equivalent of over 135,000 of 200 mm wafers/month. In September 2016, GlobalFoundries announced it would make a multibillion-dollar investment to refit Fab 8 to produce 7 nm FinFET parts starting in the second half of 2018.[59] The process was planned to initially use deep ultraviolet lithography, and eventually transition to extreme ultraviolet lithography.[60]

However, in August 2018, GlobalFoundries made the decision to suspend 7 nm development and planned production, citing the unaffordable costs to outfit Fab 8 for 7 nm production. GlobalFoundries held open the possibility of resuming 7 nm operations in the future if additional resources could be secured. From this decision GlobalFoundries executed a shift in company strategy to focus more effort on FD-SOI manufacturing and R&D. Fab 8 serves a crucial function to supply AMD (Advanced Micro Devices) with CPU Wafers for its Zen line of microprocessors used in the Ryzen, Threadripper and Epyc lines of CPUs. The original Zen and the Zen+ CPUs are of a monolithic design which were produced at Global Foundries Malta Facilities in Malta, NY. Going forward AMD will pursue a multiple Chiplet Design with the Zen 2 microprocessor. The Zen 2 will consist of a 14/12 nm manufactured IO die surrounded by a number of 7 nm Core dies. When Global Foundries announced the suspension of 7 nm operations AMD executed a shift in plans transferring production of the 7 nm core dies to TSMC (Taiwan Semiconductor Corporation). There was speculation in some quarters as to where manufacture of the Core Dies would take place. In AMD's 2018 fourth quarter financial conference call which took place on January 29, 2019, AMD CEO Lisa Su announced the WSA (Wafer Supply Agreement) governing production and acquisition by AMD from GlobalFoundries had been amended for the seventh time. The amendment stated AMD would continue to procure 12 nm node and above from Global Foundries while giving AMD latitude to purchase 7 nm node manufactured wafers from any source free from paying any royalties. The agreement will run through 2024 and ensures that Global Foundries will have work for its Malta plant for that time period. Pricing commitments for Wafers runs through 2021 when it is likely the WSA will be amended again.[61]

Accreditation as a Trusted Supplier

In May 2023, the U.S. Department of Defense (DoD), through the Defense Microelectronics Activity (DMEA), Trusted Access Program Office (TAPO), accredited GlobalFoundries' advanced manufacturing facility in Malta, New York, as a Category 1A Trusted Supplier. This accreditation enables GlobalFoundries to manufacture secure semiconductors for a wide range of critical aerospace and defense applications.[62]

Fab 10

Fab 10,[63] located in East Fishkill, New York, United States, was previously known as IBM Building 323. It became part of GlobalFoundries operations with the acquisition of IBM Microelectronics. It currently manufactures technology down to the 14 nm node. In April 2019, it was announced that this fab has been sold to ON Semiconductor for $430m. The facility will be transferred over within three years.[64]

On February 10, 2023, onsemi successfully completed its acquisition of GF's 300 mm East Fishkill, New York site and fabrication facility.[65]

200 mm fabrication facilities

All 200 mm fabs except Fab 9 are located in Singapore, and originally owned by Chartered Semiconductor.

Fab 2

Fab 2, located in Woodlands, Singapore. This fab is capable of manufacturing wafers at 600 to 350 nm for use in selected automotive IC products, High Voltage power management IC and Mixed-signal products.

Fab 3/5

Fab 3/5, located in Woodlands, Singapore. This fab is capable of manufacturing wafers at 350 to 180 nm for use in high voltage IC's for small panel display drivers and mobile power management modules.

Fab 3E

Fab 3E, located in Tampines, Singapore. This fab produces 180 nm wafers for use in selected automotive IC products, High Voltage power management IC and Mixed-Signal products with embedded non-volatile memory technology.

In January 2019 GlobalFoundries announced that it had agreed to sell its Fab 3E in Singapore to Vanguard International Semiconductor Corporation with transfer of ownership set to be completed on December 31, 2019.

Fab 6

Fab 6 located in Woodlands, Singapore, is a copper fabrication facility that is capable of manufacturing integrated CMOS and RFCMOS products for applications such as Wi-Fi & Bluetooth devices at 180 to 110 nm processes. The facility was later converted to 300mm and merged with Fab 7, a facility for manufacturing products based on the 300 nm node.

Fab 9

Fab 9,[63] located in the village of Essex Junction, Vermont, United States, near Vermont's largest city of Burlington, became part of GlobalFoundries operations with the acquisition of IBM Microelectronics. The fab manufactures technologies down to the 90 nm node and is the largest private employer within the state of Vermont. The site also hosted a captive mask shop, with development efforts down to the 7 nanometer node, until it was sold to Toppan in 2019.[66]

Mergers and acquisitions

Chartered Semiconductor

The majority investor of GlobalFoundries, Abu Dhabi's Advanced Technology Investment Co., announced on September 6, 2009, that it has agreed to acquire Singapore-based Chartered Semiconductor Manufacturing Co. Ltd., for a total of $3.9 billion, with Chartered's operations being folded into GlobalFoundries.[67]

Chartered Semiconductor is a member of the Common Platform, IBM's semiconductor technology alliance. GlobalFoundries is a JDA partner of Common Platform Technology Alliance.

IBM Microelectronics

In October 2014, GlobalFoundries received US$1.5 billion from IBM to accept taking over IBM Microelectronics, including a 200 mm fab (now Fab 9) in Essex Junction, Vermont, and a 300 mm fab (now Fab 10) in East Fishkill, New York. As part of the agreement, GlobalFoundries will be the sole provider of IBM's server processor chips for the next 10 years. The deal closed on July 1, 2015.[68] IBM-India employees who moved over to GlobalFoundries as part of the acquisition are now part of its Bangalore office.[69]

In April 2019 ON Semiconductor and GlobalFoundries announced a $430 million agreement to transfer ownership of GlobalFoundries 300mm Fab 10 in East Fishkill, New York, to ON Semiconductor.[70]

In 2021 and 2023, GlobalFoundries sued IBM over intellectual property disputes involving the latter's agreements with Intel and Rapidus.[71]

Process technologies

GlobalFoundries' 22 nm FD-SOI process is second-sourced from STMicroelectronics.[72] STMicroelectronics signed a sourcing and licensing agreement with Samsung for the same technology later.[73]

GlobalFoundries' 14 nm 14LPP FinFET process is second-sourced from Samsung Electronics. GlobalFoundries' 12 nm FinFET nodes are based on Samsung's 14 nm 14LPP process.[22]

Node nameITRS
node
(nm)
Date
introduced
Wafer size
(mm)
Lithography
(wavelength)
Transistor
type
Gate
pitch
(nm)
Metal 1
pitch
(nm)
SRAM
bit density
(µm2)
4S6001993200 BulkPlanar
CS-245001993BulkPlanar
5L500200 BulkPlanar
5S5001994200 BulkPlanar
SiGe 5HP5002001200Planar
SiGe 5AM5002001200Planar
SiGe 5DM5002002200Planar
SiGe 5PA5002002200Planar
5X4501994200 BulkPlanar
CS-343501995BulkPlanar
SiGe 5HPE3502001200Planar
SiGe 5PAe[74]3502007200Planar
SiGe 5PAx[74]3502016200Planar
SiGe 1KW5PAe[74]350200Planar
SiGe 1K5PAx[74]3502016200Planar
6S2901996200 BulkPlanar
CS-442501998BulkDry 248nm DUVPlanar
6S22501997200 BulkDry 248nm DUVPlanar
6SF250200 BulkDry 248nm DUVPlanar
6X2501997200 BulkPlanar
6RF2502001200 BulkDry 248nm DUVPlanar
250SOI2501999200 SOIDry 248nm DUVPlanar
SiGe 6HP250200Dry 248nm DUVPlanar
SiGe 6DM250200Dry 248nm DUVPlanar
SiGe 6WL2502007200Dry 248nm DUVPlanar
7S2201998200 BulkDry 248nm DUVPlanar
220SOI2201999200 SOIDry 248nm DUVPlanar
7HV1802010200Dry 248nm DUVPlanar
180 BCDLite[75]1802011200Dry 248nm DUVPlanar
180 UHV[75]1802017200Dry 248nm DUVPlanar
7SF1801999200 BulkDry 248nm DUVPlanar
7TG180200 BulkDry 248nm DUVPlanar
7RF1802003200 BulkDry 248nm DUVPlanar
8S1802000200 SOIDry 248nm DUVPlanar
7RF SOI[76]1802007200 RF-SOI, 300 RF-SOIDry 248nm DUVPlanar
7SW RF SOI[76]1802014200 RF-SOIDry 248nm DUVPlanar
SiGe 7WL[77]1802003200Dry 248nm DUVPlanar
SiGe 7HP1802003200Dry 248nm DUVPlanar
130 BCDLite[75]1302014300Dry 248nm DUVPlanar
130 BCD[75]130300Dry 248nm DUVPlanar
8SF1302000200 BulkDry 248nm DUVPlanar
8SFG1302003200 Bulk, 300 BulkDry 248nm DUVPlanar
8RF1302003200 Bulk, 300 BulkDry 248nm DUVPlanar
130G[78]130300 BulkDry 248nm DUVPlanar
130LP[78]130300 BulkDry 248nm DUVPlanar
130LP/EE[78]130300 BulkDry 248nm DUVPlanar
110TS[78]130300 BulkDry 248nm DUVPlanar
9S1302000200 SOI, 300 SOIDry 248nm DUVPlanar
130RFSOI[76]1302015300 RF-SOIDry 248nm DUVPlanar
8SW RF SOI[76]1302017300 RF-SOIDry 248nm DUVPlanar
SiGe 8WL[77]1302005200Dry 248nm DUVPlanar
SiGe 8HP[77]1302005200, 300Dry 248nm DUVPlanar
SiGe 8XP[77]1302016200Dry 248nm DUVPlanar
9SF902004300 BulkDry 193nm DUVPlanar
9LP902005300 BulkDry 193nm DUVPlanar
9RF90300 BulkDry 193nm DUVPlanar
10S902002300 SOIDry 193nm DUVPlanar
90RFSOI902004300 RF-SOIDry 193nm DUVPlanar
90WG[79]902018300Dry 193nm DUVPlanar
90WG+[79]90 ?300Dry 193nm DUVPlanar
SiGe 9HP[77]902014, 2018200, 300Dry 193nm DUVPlanar
10SF65300 BulkDry 193nm DUVPlanar
10LP65300 BulkDry 193nm DUVPlanar
65LPe[80]652009300 BulkDry 193nm DUVPlanar
65LPe-RF[80]652009300 BulkDry 193nm DUVPlanar
10RFe65300 BulkDry 193nm DUVPlanar
11S652006300 SOIDry 193nm DUVPlanar
65RFSOI652008300 RF-SOIDry 193nm DUVPlanar
55 BCDLite[80]552018300Dry 193nm DUVPlanar
55HV[81]55 ?300Dry 193nm DUVPlanar
55 ULP[80]55300 BulkDry 193nm DUVPlanar
55LPe55300 BulkDry 193nm DUVPlanar
55LPe-RF55300 BulkDry 193nm DUVPlanar
55LPx[80]55300 BulkDry 193nm DUVPlanar
55RF[80]55300 BulkDry 193nm DUVPlanar
45LP45300 BulkWet 193nm DUVPlanar
12S452007300 SOIWet 193nm DUVPlanar
45RFSOI[76]452017300 RF-SOIWet 193nm DUVPlanar
45CLO[82]452021300Wet 193nm DUVPlanar
40HV[81]40 ?300Wet 193nm DUVPlanar
40LP[83]40300 BulkWet 193nm DUVPlanar
40LP-RF[83]40300 BulkWet 193nm DUVPlanar
32LP32300 BulkWet 193nm DUV, double patterningPlanar
32SHP32 ?300 SOIWet 193nm DUV, double patterningPlanar
13S322009300 SOIWet 193nm DUV, double patterningPlanar
28HV[81]282019300Wet 193nm DUV, double patterningPlanar
28LP282009300 BulkWet 193nm DUV, double patterningPlanar
28SLP[84]282010300 BulkWet 193nm DUV, double patterningPlanar
28HP282010300 BulkWet 193nm DUV, double patterningPlanar
28HPP[84]282011300 BulkWet 193nm DUV, double patterningPlanar
28SHP282013300 BulkWet 193nm DUV, double patterningPlanar
28SLP RF282015300 BulkWet 193nm DUV, double patterningPlanar
28FDSOI[72][73]282012300 FD-SOIWet 193nm DUVPlanar
22FDX-ULP[85]222015300 FD-SOIWet 193nm DUV, double patterningPlanar
22FDX-UHP[85]222015300 FD-SOIWet 193nm DUV, double patterningPlanar
22FDX-ULL[85]222015300 FD-SOIWet 193nm DUV, double patterningPlanar
22FDX-RFA[85]222017300 FD-SOIWet 193nm DUV, double patterningPlanar
22FDX RF+[86]222021300 FD-SOIWet 193nm DUV, double patterningPlanar
14LPP[87]142015300 BulkWet 193nm DUV, double patterning3D (FinFET)78640.09
14HP[88]142017300 SOIWet 193nm DUV, double patterning3D (FinFET)
12LP[89]122018300 BulkWet 193nm DUV, double patterning3D (FinFET)
12LP+[90]122019300 BulkWet 193nm DUV, double patterning3D (FinFET)

Number of processes currently listed here: 102

See also

References

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